DC bias

DC substrate bias effects on the physical properties of hydrogenated amorphous carbon films grown by plasma-assisted chemical vapour deposition

In the present work, $a$-C:H films have been grown from argon/methane gas mixtures by Electron Cyclotron Resonance Chemical Vapour …

J. G. Buijnsters, M. Camero, L. Vázquez, F. Agulló-Rueda, C. Gómez-Aleixandre, J. M. Albella