Plasma-enhanced CVD

Tribological study of hydrogenated amorphous carbon films with tailored microstructure and composition produced by bias-enhanced plasma chemical vapour deposition

We investigated the mechanical and tribological properties of hydrogenated amorphous carbon (a-C:H) films on silicon substrates by …

J. G. Buijnsters, M. Camero, L. Vázquez, F. Agulló-Rueda, R. Gago, I. Jiménez, C. Gómez-Aleixandre, J. M. Albella