P. Herrero

Recientes

• Nanostructural changes upon substitutional Al doping in ZnO sputtered films
• Characterization of the interface between highly conductive Ga:ZnO films and the silicon substrate
• Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching
• Differences in n-type doping efficiency between Al- and Ga-ZnO films
• Highly conductive Ga-doped ZnO thin films deposited onto Si wafers: Interface characterization
• Nanostructure of the Interfaces Between ZnO, ZnO:Ga and ZnO:Al Films and Silicon
• High quality ZnO and Ga:ZnO thin films grown onto crystalline Si (100) by RF magnetron sputtering
• TiN$_x$O$_y$/TiN dielectric contrasts obtained by ion implantation of O$^{2+}$; structural, optical and electrical properties